Title:
SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR
Document Type and Number:
WIPO Patent Application WO/2016/013401
Kind Code:
A1
Abstract:
Provided is a technique for improving the film quality of a thin film deposited on a substrate. Drive units driving a substrate transport mechanism which transports a plurality of substrates side-by-side in a row along a transport pathway, provided in a first vessel in such a way as to extend from a loading port to an unloading port, and which load and unload the substrates sequentially into and out from a second vessel, are formed in such a way as to be detachable from the substrate transport mechanism which is provided in the first vessel, and are disposed respectively in a substrate loading chamber and a substrate unloading chamber.
Inventors:
FUJIKURA HAJIME (JP)
KONNO TAICHIRO (JP)
NONAKA TAKEHIRO (JP)
NUMATA TAKAYUKI (JP)
KONNO TAICHIRO (JP)
NONAKA TAKEHIRO (JP)
NUMATA TAKAYUKI (JP)
Application Number:
PCT/JP2015/069684
Publication Date:
January 28, 2016
Filing Date:
July 08, 2015
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
H01L21/677; B65G49/07; C23C16/44; H01L21/205
Foreign References:
| JPH11293459A | 1999-10-26 | |||
| JP2012129554A | 2012-07-05 | |||
| JPS5986216A | 1984-05-18 | |||
| JP2002075990A | 2002-03-15 | |||
| JP2006509905A | 2006-03-23 | |||
| JP2001135704A | 2001-05-18 |
Other References:
See also references of EP 3174089A4
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
Ryuka international patent business corporation (JP)
Ryuka international patent business corporation (JP)
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