Title:
SEMICONDUCTOR PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/025496
Kind Code:
A1
Abstract:
A semiconductor physical quantity sensor (10) provided with: a first base material (20); an electrode (60) formed on the first base material (20); a diaphragm (60) which flexes in accordance with a physical quantity applied from the exterior; a second base material (30) for supporting the diaphragm (50) so as to face the electrode (60) across a space (S), the second base material (30) being fixed to the first base material (20); and an insulator (40) formed on the first base material (20)-side surface (50a) of the diaphragm (50). A wall part (41) defining the space (S) is formed between the insulator (40) and the electrode (60).
Inventors:
KATAOKA KAZUSHI
OGIHARA JUN
USHIYAMA NAOKI
SHIROISHI HISANORI
OGIHARA JUN
USHIYAMA NAOKI
SHIROISHI HISANORI
Application Number:
PCT/JP2014/004139
Publication Date:
February 26, 2015
Filing Date:
August 08, 2014
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L29/84; G01L9/00
Foreign References:
| JPH10332511A | 1998-12-18 | |||
| JPH08320268A | 1996-12-03 | |||
| JPH10509241A | 1998-09-08 | |||
| JPH10160611A | 1998-06-19 |
Attorney, Agent or Firm:
ITO, Masakazu et al. (JP)
Masakazu Ito (JP)
Masakazu Ito (JP)
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