Title:
A SEMICONDUCTOR PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2008/049290
Kind Code:
A1
Abstract:
A semiconductor processing equipment (116), comprising columnar inner sidewall
(116d) and outer sidewall (116b), a flange (116a) outwards extending from the
outer sidewall, a shielding plate (116c) between the inner sidewall and the outer
sidewall, in which, the outer sidewall extends upwardly perpendicularly or
at an angle from the upper surface of the flange in first length (116g) and the outer
sidewall extends downwards perpendicularly or at an angle from the shielding
plate in second length (116f); the inner sidewall extends upwardly perpendicularly
or at an angle from the shielding plate in third length and downwards perpendicularly
or at an angle from the shielding plate in fourth length (116e); the shielding
plate is step shape, and the upper step surface and lower step surface are provided
with rows of apertures (170) distributing uniformly.
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Inventors:
LIN SHENG (CN)
Application Number:
PCT/CN2007/000543
Publication Date:
May 02, 2008
Filing Date:
February 14, 2007
Export Citation:
Assignee:
BEIJING NMC CO LTD (CN)
LIN SHENG (CN)
LIN SHENG (CN)
International Classes:
H01L21/00
Foreign References:
| CN1333917A | 2002-01-30 | |||
| CN1327612A | 2001-12-19 | |||
| US5788799A | 1998-08-04 | |||
| US20050109276A1 | 2005-05-26 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEY (Room 718 Beijing Capital Times Square,88 Xichang'an Avenue,Xicheng District, Beijing 1, CN)
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