Title:
SEMICONDUCTOR TEST DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/026753
Kind Code:
A1
Abstract:
A semiconductor test device, comprising a test device body generating a test pattern provided to a semiconductor device, a test head coming into contact with the semiconductor device to provide the test pattern generated by the test device body to the semiconductor device, a cable receiving the test pattern from the test device body and sending the test pattern to the test head, and a movable support part holding the cable and moving in the direction that releases a tension in the cable when the tension is produced in the cable.
Inventors:
NAITO TAKASHI (JP)
Application Number:
PCT/JP2004/013048
Publication Date:
March 24, 2005
Filing Date:
September 08, 2004
Export Citation:
Assignee:
ADVANTEST CORP (JP)
NAITO TAKASHI (JP)
NAITO TAKASHI (JP)
International Classes:
G01R31/319; G01R31/28; (IPC1-7): G01R31/28
Foreign References:
| JPH06300819A | 1994-10-28 | |||
| JP2597779Y2 | 1999-07-12 | |||
| JPH0669296A | 1994-03-11 | |||
| JP2002189037A | 2002-07-05 |
Other References:
See also references of EP 1666899A4
Attorney, Agent or Firm:
Ryuka, Akihiro (24-12 Shinjuku 1-chome, Shinjuku-k, Tokyo 22, JP)
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