Title:
SENSOR AND DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2007/037386
Kind Code:
A1
Abstract:
Sensors having uniform characteristics and perform stable measurement in a
solution, and a device using such sensors are provided. On one end side of a substrate,
one of electrodes arranged on both planes of a piezoelectric plate is fixed to
be covered through a space. The substrate is formed by stacking a plurality of
flat plates to have a shape that extends from the piezoelectric plate.
Inventors:
WAGATSUMA MICHIRU (JP)
TANAKA MASARU (JP)
TANAKA MASARU (JP)
Application Number:
PCT/JP2006/319495
Publication Date:
April 05, 2007
Filing Date:
September 29, 2006
Export Citation:
Assignee:
ULVAC INC (JP)
WAGATSUMA MICHIRU (JP)
TANAKA MASARU (JP)
WAGATSUMA MICHIRU (JP)
TANAKA MASARU (JP)
International Classes:
G01N5/02
Foreign References:
| JP2000258324A | 2000-09-22 | |||
| JPH1038788A | 1998-02-13 | |||
| JPH07190919A | 1995-07-28 | |||
| JPH09145583A | 1997-06-06 | |||
| JP2004264255A | 2004-09-24 |
Attorney, Agent or Firm:
SHIMIZU, Yoshihiro et al. (Yashiro Building 14-4, Takadanobaba 2-chom, Shinjuku-ku Tokyo, JP)
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