Title:
SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/002866
Kind Code:
A1
Abstract:
Provided is a sensor device that reduces interference when achieving both detection of force of an object and detection of proximity of the object. A sensor device (1) comprises: a force sensor (3) provided on top of a substrate (11); a light emitting unit (21) that emits light from the top of the substrate; a light receiving unit (22) that receives light on the top of the substrate to detect proximity of an object; and an elastic member (4) integrally formed of an elastic material. The elastic member includes: a first part (41) that covers the force sensor; a second part (42) that is located around the light emitting unit and the light receiving unit, and that extends between at least the light emitting unit, the light receiving unit, and the force sensor; and a third part (40) that couples the first part and the second part. In the elastic member, the height of the third part above the substrate is lower than those of the first and second parts.
Inventors:
WATANABE HIROSHI (JP)
SUGAHARA KOHEI (JP)
INOUE KOICHI (JP)
KATO TAKATOSHI (JP)
SUGAHARA KOHEI (JP)
INOUE KOICHI (JP)
KATO TAKATOSHI (JP)
Application Number:
PCT/JP2022/027065
Publication Date:
January 26, 2023
Filing Date:
July 08, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L5/00; G01V8/12; G01V9/00; G01V11/00; H01L31/12
Domestic Patent References:
| WO2021100261A1 | 2021-05-27 | |||
| WO2009144767A1 | 2009-12-03 |
Foreign References:
| US20140326882A1 | 2014-11-06 | |||
| US20120240691A1 | 2012-09-27 | |||
| JPS60168028A | 1985-08-31 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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