Title:
SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/240175
Kind Code:
A1
Abstract:
In a piezoelectric body of a sensor element, two driving arms extend parallel to one another from a base portion toward a +y side. Two detecting arms extend parallel to one another from the base portion toward a -y side. A retaining portion extends from the base portion toward the -y side, between the two detecting arms, and extends out further to the -y side than distal ends of the two detecting arms. A mounting portion is connected to a -y side end portion, and a plurality of element terminals are positioned thereon. The retaining portion includes a main portion and a connecting portion. If a length in the x-direction is defined as a width, the main portion extends toward the base portion side from between the distal ends of the two detecting arms, while maintaining a width at least approximately equal to the width of a part thereof positioned between the distal ends of the two detecting arms. The connecting portion is connected to the main portion and the base portion and has a greater width than the main portion.
Inventors:
SOEJIMA MUNETAKA (JP)
TAKANAMI SHUN (JP)
TAKANAMI SHUN (JP)
Application Number:
PCT/JP2019/023298
Publication Date:
December 19, 2019
Filing Date:
June 12, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/5607; H01L41/113
Foreign References:
| JPH1054725A | 1998-02-24 | |||
| JP2015102331A | 2015-06-04 | |||
| JPH1172333A | 1999-03-16 | |||
| JPH1054725A | 1998-02-24 | |||
| JP2015141184A | 2015-08-03 | |||
| JP2015141183A | 2015-08-03 |
Other References:
See also references of EP 3812703A4
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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