SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

Title:

SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

Document Type and Number:

WIPO Patent Application WO/2019/240176

Kind Code:

A1

Abstract:

In a piezoelectric body of this sensor element, two driving arms extend parallel to each other in the +y direction from a base. Two detection arms extend parallel to each other in the -y direction from the base. A retaining part extends in the -y direction from the base between the two detection arms, and extends in the -y direction further than the distal ends of the two detection arms. A mounting part is connected to the end part on the -y side of the retaining part, and has a detection-side extension part and two lateral extension parts. The detection-side extension part extends in the x direction and -x direction from the position of connection thereof to the retaining part. The two lateral extension parts extend in the +y direction from the +x-side and -x-side positions of the detection-side extension part, further than both of the two detection arms. At least one of a plurality of element terminals is positioned further in the +y direction than the detection-side extension part.

Inventors:

SOEJIMA MUNETAKA (JP)
TAKANAMI SHUN (JP)

Application Number:

PCT/JP2019/023299

Publication Date:

December 19, 2019

Filing Date:

June 12, 2019

Export Citation:

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Assignee:

KYOCERA CORP (JP)

International Classes:

G01C19/5607; H01L41/113

Foreign References:

JP2016017825A	2016-02-01
JP2008232696A	2008-10-02
JP2008107271A	2008-05-08
JPH1054725A	1998-02-24
JP2015149591A	2015-08-20
JP2015141184A	2015-08-03
JP2015141183A	2015-08-03

Other References: