Title:
SENSOR ELEMENT, INERTIA SENSOR AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/088065
Kind Code:
A1
Abstract:
A sensor element according to an embodiment of the present technology is provided with a base part, a movable part, first and second bridge parts, and an acceleration detecting part. The movable part is configured to receive an acceleration in at least one axial direction and to be movable relative to the base part. The first bridge part has: first beams which extend in a first axial direction parallel to a primary surface of the base part, and connect the base part with the movable part; and first structures which are respectively provided between the first beams and the base part, and support the first beams. The second bridge part has: second beams which extend in a second axial direction perpendicular to the first axis and parallel to the primary surface, and connect the base part with the movable part; and second structures which are respectively provided between the second beams and the base part, and support the second beams. The acceleration detecting parts are respectively disposed in the first and second beams, and output first detection signals according to the deformation amounts of the first and second beams.
Inventors:
KABASAWA HIDETOSHI (JP)
KATO YUSAKU (JP)
MITANI SATOSHI (JP)
KATO YUSAKU (JP)
MITANI SATOSHI (JP)
Application Number:
PCT/JP2017/035956
Publication Date:
May 17, 2018
Filing Date:
October 03, 2017
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
G01P15/18; G01C19/56; G01P15/08; G01P15/09; G01P15/12; G01P15/125
Domestic Patent References:
| WO2007125961A1 | 2007-11-08 |
Foreign References:
| US20150135834A1 | 2015-05-21 | |||
| JP2011257209A | 2011-12-22 | |||
| JP2011203228A | 2011-10-13 | |||
| JPH07167885A | 1995-07-04 | |||
| JPH05333052A | 1993-12-17 | |||
| JPH04178561A | 1992-06-25 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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