SENSOR USING SENSING MECHANISM HAVING COMBINED STATIC CHARGE AND FIELD EFFECT TRANSISTOR

WIPO Patent Application WO/2013/168922

A1

The present invention relates to a sensor that uses a sensing mechanism having a combined static charge and a field effect transistor, the sensor including: a substrate; source and drain units formed on the substrate and separated from each other; a channel unit interposed between the source and drain units; a membrane separated from the channel unit, disposed on a top portion and displaced in response to an external signal; and a static charge member formed on a bottom surface of the membrane separately from the channel unit and generating an electric field. Accordingly, since the sensor using a sensing mechanism having a combined static charge and a field effect transistor according to an embodiment of the present invention can measure the displacement or movement of the sensor by measuring a change of the electric field of the channel unit of the field effect transistor by using a static member, the electric field can be formed so as to be proportional to an amount of charge and inversely proportional to a squared distance regardless of the intensity and distribution of an external electric field. Therefore, sensitivity is improved without being affected by an external electric field.

MOON WON KYU (KR)
WEST JAMES EDWARD (US)
SUNG MIN (KR)
JE YUB (KR)
SHIN KUM JAE (KR)

PCT/KR2013/003727

November 14, 2013

April 30, 2013

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POSTECH ACAD IND FOUND (KR)

H01L29/82; H01L29/78

JP2007227850A	2007-09-06
JPS645075A	1989-01-10
JPH0730128A	1995-01-31

YOU ME PATENT AND LAW FIRM (KR)
유미특허법인 (KR)

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