Title:
SHAPE INSPECTION METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/061976
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a three-dimensional-shape inspection method and device in which high precision of measurement is maintained irrespective of the shape of the measured subject, by complementarily combining a plurality of three-dimensional-shape measurement methods and surface measurement methods. The present invention provides a three-dimensional-shape inspection device characterized in comprising a first three-dimensional-shape sensor for acquiring first shape data for an inspection subject, a second three-dimensional-shape sensor for acquiring second shape data different from the first shape data for the inspection subject, and a complementary integration unit for correcting and integrating the first shape data and the second shape data.
Inventors:
TANIGUCHI ATSUSHI (JP)
SAKAI KAORU (JP)
MARUYAMA SHIGENOBU (JP)
MAEDA SHUNJI (JP)
SAKAI KAORU (JP)
MARUYAMA SHIGENOBU (JP)
MAEDA SHUNJI (JP)
Application Number:
PCT/JP2012/077386
Publication Date:
May 02, 2013
Filing Date:
October 24, 2012
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01B21/20; G01B11/24
Foreign References:
| JP2005215917A | 2005-08-11 | |||
| JP2010160135A | 2010-07-22 | |||
| JP2009058459A | 2009-03-19 | |||
| JP2007333462A | 2007-12-27 | |||
| JP2005122706A | 2005-05-12 | |||
| JP2011175600A | 2011-09-08 |
Other References:
SZYMON RUSINKIEWICZ ET AL.: "Efficient Variants of the ICP Algorithm, 3-D Digital Imaging and Modeling 2001. proceedings.", THIRD INTERNATIONAL CONFERENCE, pages 145 - 152
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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Claims: