Title:
SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/171263
Kind Code:
A1
Abstract:
[Problem] To more accurately measure a surface height of a rigid body to be measured even when any of three disturbances, which are parallel movement in a height direction, rotation around a longitudinal-direction axis, and rotation around a width-direction axis, occurs during conveyance. [Solution] A shape measuring apparatus according to the present invention uses: a shape-measurement optical section line which extends in the width direction of a rigid body to be measured, and which is used for calculating the surface shape of the rigid body to be measured; a first correction optical section line which is parallel to the longitudinal direction of the rigid body to be measured while intersecting the shape-measurement optical section line, and which is used for correcting effects of a disturbance on the rigid body to be measured; and a second correction optical section line which is parallel to the longitudinal direction of the rigid body to be measured while intersecting the shape-measurement optical section line, and which exists at a position, in the width direction of the rigid body to be measured, different from the position of the first correction optical section line. On the basis of the two correction optical section lines, the magnitude of a disturbance is estimated at the intersection points of the shape-measurement optical section line and the respective correction optical section lines, and shape data obtained from the shape-measurement optical section line is corrected.
Inventors:
HIBI ATSUHIRO (JP)
KONNO YUSUKE (JP)
FURUYA NOBUHIRO (JP)
KUROIWA TOMOHIRO (JP)
KONNO YUSUKE (JP)
FURUYA NOBUHIRO (JP)
KUROIWA TOMOHIRO (JP)
Application Number:
PCT/JP2016/062801
Publication Date:
October 27, 2016
Filing Date:
April 22, 2016
Export Citation:
Assignee:
NIPPON STEEL & SUMITOMO METAL CORP (JP)
International Classes:
G01B11/25; G01B11/02
Foreign References:
| JP2013221799A | 2013-10-28 | |||
| JP2012032271A | 2012-02-16 |
Other References:
See also references of EP 3270104A4
Attorney, Agent or Firm:
KAMEYA, Yoshiaki et al. (JP)
Yoshiaki Kameya (JP)
Yoshiaki Kameya (JP)
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