Title:
SHAPE MEASURING DEVICE, OBSERVATION DEVICE, AND IMAGE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/134343
Kind Code:
A1
Abstract:
Provided is a shape measuring device whereby the shapes of objects to be measured can be identified at a high resolution, an observation device, and an image processing method.
The shape measuring device is equipped with the following: a high speed image processor (34) wherein one target image and at least one reference image other than the target image are extracted from a plurality of images, wherein a digital operator (OP1) is caused to act on the target image and the reference image, and wherein local degrees of combined focusing are calculated for each pair of extracted target image and reference image on a pixel by pixel basis with respect to the target image; and a control computer (35) wherein the surface heights of objects to be measured are found on the basis of those relative movement positions pertaining to a plurality of local degrees of combined focusing calculated on a pixel by pixel basis which become maximum for each pixel. The digital operator (OP1) has coefficients which, in the calculation of local degrees of combined focusing, are weighted with respect to the pixel values of observed pixels of target images and to the pixel values of adjacent pixels existing at pixel locations different from locations of observed pixels in the reference image. Degrees of combined focusing are derivative values of the following as acted upon by the digital operator (OP1): pixel values of pixels observed; and pixel values of adjacent pixels.
Inventors:
NISHIKAWA TAKASHI (JP)
Application Number:
PCT/JP2010/003385
Publication Date:
November 25, 2010
Filing Date:
May 20, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
NISHIKAWA TAKASHI (JP)
NISHIKAWA TAKASHI (JP)
International Classes:
G01B11/24; G01B9/02
Foreign References:
| JPH0363507A | 1991-03-19 | |||
| JP2001066112A | 2001-03-16 | |||
| JPH11183147A | 1999-07-09 |
Attorney, Agent or Firm:
OHNISHI, Shogo (JP)
Shogo Onishi (JP)
Shogo Onishi (JP)
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Claims:
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