Title:
SLIT COATER
Document Type and Number:
WIPO Patent Application WO/2020/130045
Kind Code:
A1
Abstract:
[Problem] To provide a slit coater with which a slit cap can be easily switched and a coating film with an arbitrary shape can be formed. [Solution] This slit coater (1) has: a slit die (20) that has a fixed die plate (24), a movable die plate (21) movable in the lengthwise direction relative to the fixed die plate (24), and a slit-like nozzle (81) formed on a joining surface between the fixed die plate (24) and the movable die plate (21); a movable die plate sliding mechanism (23) for moving the movable die plate (21) to change the slit length of the slit-like nozzle (81); a slit die sliding mechanism (22) for moving the slit die (20) along a main frame (8); and a stage driving mechanism (12) for transporting a substrate (3), wherein the fixed die plate (24) and the movable die plate (21) are respectively provided with seam plates (76, 71) that are detachably fixed thereto and that specify the sizes of slit gaps G of the slit-like nozzle (81).
Inventors:
FUKUI KATSUYUKI (JP)
MIYAZAKI DAISUKE (JP)
MIYAZAKI DAISUKE (JP)
Application Number:
PCT/JP2019/049660
Publication Date:
June 25, 2020
Filing Date:
December 18, 2019
Export Citation:
Assignee:
IINUMA GAUGE MFG CO LTD (JP)
International Classes:
B05C5/02
Foreign References:
| JP2004313874A | 2004-11-11 | |||
| JP2018069230A | 2018-05-10 | |||
| JP2004358311A | 2004-12-24 | |||
| JP2015062219A | 2015-04-02 | |||
| JPH11179260A | 1999-07-06 | |||
| JPH1099764A | 1998-04-21 | |||
| JPH0647331A | 1994-02-22 | |||
| JP2004313874A | 2004-11-11 | |||
| JP2018069230A | 2018-05-10 |
Other References:
See also references of EP 3900843A4
Attorney, Agent or Firm:
MEBUKI IP LAW FIRM et al. (JP)
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