SOLID-STATE LASER SYSTEM AND EXCIMER LASER SYSTEM

WIPO Patent Application WO/2017/064789

A1

Disclosed is a solid-state laser system that may be provided with: a solid-state laser device that outputs first pulsed laser light having a first wavelength, and second pulsed laser light having a second wavelength; a first solid-state amplifier, to which the first pulsed laser light is inputted, and from which third pulsed laser light having the first wavelength is outputted; a wavelength conversion unit, to which the third pulsed laser light is inputted, and from which harmonic light having a third wavelength is outputted; a second solid-state amplifier, to which second pulsed laser light is inputted, and from which fourth pulsed laser light having the second wavelength is outputted; a Raman laser device, to which the fourth pulsed laser light is inputted, and from which Stokes light having a fourth wavelength is outputted; and a wavelength conversion system, to which the harmonic light and the Stokes light are inputted, and from which fifth pulsed laser light having a fifth wavelength is outputted, said fifth pulsed laser light having been subjected to wavelength conversion from the third wavelength and the fourth wavelength.

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KOBAYASHI YOHEI (JP)
ITO SHINJI (JP)

PCT/JP2015/079151

April 20, 2017

October 15, 2015

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UNIV TOKYO (JP)
GIGAPHOTON INC (JP)

G02F1/35; G02F1/37; H01S3/067; H01S3/30

WO2015140901A1

2015-09-24

JP2009513995A	2009-04-02
JP2014530380A	2014-11-17
JP2008511182A	2008-04-10
JP2009535666A	2009-10-01
JP2011128330A	2011-06-30

TSUBASA PATENT PROFESSIONAL CORPORATION (JP)

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