Title:
SOUNDPROOF COVER FOR CHARGED-PARTICLE BEAM DEVICE, AND CHARGED-PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/136909
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a soundproof cover and a charged-particle beam device wherein it is possible to reduce the size and to inhibit damages to an image caused by a specific frequency. In order to achieve said purpose, the present invention provides a soundproof cover for surrounding a charged-particle beam device, the soundproof cover being provided with a hollow space formation member for forming a cylindrical body having a wall surface along the inner wall of the soundproof cover, wherein one end of the cylindrical body formed by means of the hollow space formation member is open and the other end of the cylindrical body is closed. The present invention also provides a charged-particle beam device surrounded by said soundproof cover.
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Inventors:
MUTO DAISUKE (JP)
KIKUCHI HIDEKI (JP)
UEDA KOTA (JP)
NAGAOKI ISAO (JP)
TAKANO YASUSHI (JP)
KIKUCHI HIDEKI (JP)
UEDA KOTA (JP)
NAGAOKI ISAO (JP)
TAKANO YASUSHI (JP)
Application Number:
PCT/JP2013/053788
Publication Date:
September 19, 2013
Filing Date:
February 18, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/09; H01J37/16
Domestic Patent References:
| WO2011158458A1 | 2011-12-22 |
Foreign References:
| JP2006079870A | 2006-03-23 | |||
| JP2009220652A | 2009-10-01 | |||
| JP2008009014A | 2008-01-17 | |||
| JPH06222778A | 1994-08-12 | |||
| JP2008138505A | 2008-06-19 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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