Title:
SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/070853
Kind Code:
A1
Abstract:
Provided is a spatial light modulator capable of accurately and stably driving each mirror element. Specifically provided is a spatial light modulator which spatially modulates incident light and emits the spatially modulated incident light, said spatial light modulator being provided with a mirror element which reflects the incident light, a base part, and an actuator which is provided between the base part and the mirror element and changes the relative positional relationship between the base part and the mirror element. The actuator comprises a drive source member having electric field responsiveness, and a pair of electrodes disposed so as to sandwich the drive source member therebetween. The drive source member contains a polymeric material.
Inventors:
MIYAKE NORIO (JP)
Application Number:
PCT/JP2010/068246
Publication Date:
June 16, 2011
Filing Date:
October 18, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
MIYAKE NORIO (JP)
MIYAKE NORIO (JP)
International Classes:
G02B26/08; G03F7/20; H01L21/027
Domestic Patent References:
| WO2009078223A1 | 2009-06-25 |
Foreign References:
| JP2002328315A | 2002-11-15 | |||
| JP2009009093A | 2009-01-15 | |||
| JP2005176428A | 2005-06-30 | |||
| JP4287504B1 | 2009-07-01 | |||
| JP2006075943A | 2006-03-23 | |||
| JP2001350106A | 2001-12-21 | |||
| JP2006043778A | 2006-02-16 |
Attorney, Agent or Firm:
YAMAGUCHI TAKAO (JP)
Takao Yamaguchi (JP)
Takao Yamaguchi (JP)
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