Title:
SPECTROPHOTOMETER, SPECTROSCOPIC ANALYZER, AND METHOD FOR MANUFACTURING SPECTROPHOTOMETER
Document Type and Number:
WIPO Patent Application WO/2020/129519
Kind Code:
A1
Abstract:
This spectrophotometer 300 comprises: a white light source 212; condenser lenses 242a, 242b that condense the light emitted by the white light source 212; a slit 245 that diffracts the light condensed by the condenser lenses 242a, 242b; a concave diffraction grating 246 that splits the light that has passed through the slit 245; and a multiwavelength detector 248 having a plurality of photo detection elements 304 that detect the light split by the concave diffraction grating 246; wherein, each of the plurality of photo detection elements 304 of the multiwavelength detector 248 are arranged at image focus positions on the concave diffraction grating 246.
More Like This:
Inventors:
YAEGASHI KENTA (JP)
EBATA YOSHISADA (JP)
AONO TAKANORI (JP)
EBATA YOSHISADA (JP)
AONO TAKANORI (JP)
Application Number:
PCT/JP2019/045207
Publication Date:
June 25, 2020
Filing Date:
November 19, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01J3/20; G01J3/36; G01N21/27; G02B5/18; H01L31/00
Domestic Patent References:
| WO2018079276A1 | 2018-05-03 |
Foreign References:
| JP2004309146A | 2004-11-04 |
Other References:
KUDO KEIEI: "Basics and Methods of Spectroscopy", July 1985, OHMSHA, LTD.
See also references of EP 3901596A4
See also references of EP 3901596A4
Attorney, Agent or Firm:
KAICHI IP (JP)
Download PDF: