Title:
SPECTROSCOPIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/127269
Kind Code:
A1
Abstract:
This spectroscopic device comprises: an oscillating element having an oscillating surface; a diffraction grating for spectrally diffracting measurement light that has been reflected by the oscillating surface; a first light detecting unit including a first light detector for detecting a portion of the measurement light that has been spectrally diffracted by the diffraction grating; a light source for emitting inspection light; and a second light detecting unit including a second light detector for detecting the inspection light that has been reflected by the oscillating surface. The oscillating element includes: a supporting portion; a movable portion including the oscillating surface; and a linking portion linking the supporting portion and the movable portion such that a deflection angle of the oscillating surface varies about a predetermined axis. The second light detecting unit has an elongate light receiving region of which a longitudinal direction is a movement direction of the inspection light.
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Inventors:
NOZAKI MAKOTO (JP)
SAKURAI NAOTO (JP)
IWASAKI NORIHIRO (JP)
SAKURAI NAOTO (JP)
IWASAKI NORIHIRO (JP)
Application Number:
PCT/JP2022/040218
Publication Date:
July 06, 2023
Filing Date:
October 27, 2022
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J3/06; G01J3/18; G01J3/32
Domestic Patent References:
| WO1996026414A1 | 1996-08-29 |
Foreign References:
| US20040125374A1 | 2004-07-01 | |||
| JP2006208243A | 2006-08-10 | |||
| JP2016128789A | 2016-07-14 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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