Title:
SPECTROSCOPIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/070302
Kind Code:
A1
Abstract:
A spectroscopic sensor (1) is provided with: a plurality of interference filters (20A, 20B, 20C) for selectively passing through light having a wavelength within a predetermined range depending on the incident position and each having a cavity layer (21) and a first and second mirror layer (22, 23) facing one another with the cavity layer (21) therebetween; a light transmissive substrate (3) disposed on the side of the first mirror layer (22) and for passing through the light that entered the interference filters (20A, 20B, 20C); and a light detection substrate (4) disposed on the side of the second mirror layer (23) and for detecting the light that passed through the interference filters (20A, 20B, 20C). The second mirror layer (23) is divided with respect to each interference filter (20A, 20B, 20C). The cavity layer (21) is integrally formed along each interference filter (20A, 20B, 20C), and a portion of the cavity layer (21) edges into a region between the neighboring second mirror layers (23, 23).
Inventors:
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
TAKASAKA MASAOMI (JP)
Application Number:
PCT/JP2011/071536
Publication Date:
May 31, 2012
Filing Date:
September 21, 2011
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
International Classes:
G01J3/02; G01J1/04; G01J3/26
Domestic Patent References:
| WO2006100903A1 | 2006-09-28 |
Foreign References:
| JPS6457134A | 1989-03-03 | |||
| JP2003270042A | 2003-09-25 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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Claims: