Title:
SPECTROSCOPIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/051372
Kind Code:
A1
Abstract:
A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, according to the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); and a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20). The cavity layer (21) has: a filter region (24) interposed between the first and second mirror layers (22, 23); an annular encircling region (25) that encircles the filter region (24) at a prescribed distance from the filter region (24); and an annular connection region (26) that connects a terminal section (24e) on the light detection substrate (4) side of the filter region (24) and a terminal section (25e) on the light detection substrate (4) side of the encircling region (25).
Inventors:
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
KASAHARA TAKASHI (JP)
Application Number:
PCT/JP2012/073080
Publication Date:
April 11, 2013
Filing Date:
September 10, 2012
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
International Classes:
G01J3/26; G01J3/36
Foreign References:
| JPH05322653A | 1993-12-07 | |||
| JPS58195127A | 1983-11-14 | |||
| JPH07243963A | 1995-09-19 | |||
| JPH02257676A | 1990-10-18 | |||
| JPS6457134A | 1989-03-03 | |||
| JPH06129908A | 1994-05-13 | |||
| JP2009003284A | 2009-01-08 | |||
| JP2006058301A | 2006-03-02 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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Claims: