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Patent Searching and Data


Title:
SPIN COATING METHOD AND SPIN COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/150868
Kind Code:
A1
Abstract:
This spin coating method has: a holding step wherein a lens, which has a surface to be coated, a lens surface on the reverse side of the surface to be coated, and a lens side surface adjacent to the outer end of the surface to be coated and that of the lens surface, is rotatably held by having the surface to be coated facing up and a rotation axis line at the center, said axis line intersecting the surface to be coated; and a coating step wherein a coating agent is applied and spread by rotating the lens with the coating agent disposed on the surface to be coated. In the holding step, the lens is held in a region on the lens side surface using a holding member for holding the lens, said region being further inside than the boundary to the surface to be coated, and the boundary to the lens surface.

Inventors:
KATABUCHI KEIICHI (JP)
Application Number:
PCT/JP2013/056829
Publication Date:
October 10, 2013
Filing Date:
March 12, 2013
Export Citation:
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Assignee:
OLYMPUS CORP (JP)
International Classes:
B05D1/40; B05C11/08; B05C13/02
Domestic Patent References:
WO2009119348A12009-10-01
Foreign References:
JP2008218535A2008-09-18
JP2004273845A2004-09-30
JP2004273846A2004-09-30
JPH05253528A1993-10-05
JPH1120037A1999-01-26
JP2010045233A2010-02-25
JPH01144543A1989-06-06
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Sumio Tanai (JP)
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