Title:
SPRAY NOZZLE, SPRAYING PROCESSING DEVICE, PROCESSING METHOD, METHOD FOR MANUFACTURING CELL MATERIAL, AND SECONDARY CELL
Document Type and Number:
WIPO Patent Application WO/2014/112559
Kind Code:
A1
Abstract:
A spray nozzle is provided with: a spraying opening for spraying a fluid mixture composed of particles and a gas; a first flow channel that extends in a first direction up to the spraying opening; a flow distribution region provided on the opposite side of the spraying opening of the first flow channel and comprising a plurality of flow distribution channels aligned in a direction intersecting the first direction; a second flow channel that carries the particles in a second direction that forms a predetermined angle with respect to the first direction and causes the particles to merge into the flow distribution region; and a third flow channel that sprays a gas into the first flow channel.
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Inventors:
SEPASY ZAHMATY MOHAMMAD SAEED (JP)
SEKIMOTO TATSUYA (JP)
SEKIMOTO TATSUYA (JP)
Application Number:
PCT/JP2014/050689
Publication Date:
July 24, 2014
Filing Date:
January 16, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
C23C24/04; B05B7/14; C23C4/00; H01M4/04
Foreign References:
| JPS62501893A | 1987-07-30 | |||
| JP2012072491A | 2012-04-12 | |||
| JPH0671200A | 1994-03-15 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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