Title:
STAGE APPARATUS AND EXPOSURE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/075575
Kind Code:
A1
Abstract:
When a stage (WST) whereupon a wafer (W) is placed is driven in an X axis direction by a linear motor, a reaction force of the driving force is generated to a stator and is operated to counter weights (44A, 44B) through the stator. Then, the counter weights move in an opposite direction to the stage, in accordance with the movement of the stage in the X axis direction. Therefore, the reaction force generated by driving of the stage can be substantially cancelled by the movement of the counter weights. Since the counter weight is provided with a first portion (52) connected to the first stator, and a second portion (54), which is separated from the first portion in the X axis direction and is connected with the first portion through a connecting section (55), a partition wall of a chamber (45) can be arranged by having the connecting portion as a boundary, and the second portion of the counter weight can be positioned outside the partition wall. Thus, a stage storing space can be set small.
Inventors:
TANAKA KEIICHI (JP)
Application Number:
PCT/JP2006/300143
Publication Date:
July 20, 2006
Filing Date:
January 10, 2006
Export Citation:
Assignee:
NIKON CORP (JP)
TANAKA KEIICHI (JP)
TANAKA KEIICHI (JP)
International Classes:
H01L21/027; G03F7/20; H01J37/20; H01L21/68
Foreign References:
| JP2004134682A | 2004-04-30 | |||
| JP2004193425A | 2004-07-08 | |||
| JP2004140145A | 2004-05-13 | |||
| JP2002208562A | 2002-07-26 | |||
| JP2002198310A | 2002-07-12 | |||
| JPH11189332A | 1999-07-13 |
Attorney, Agent or Firm:
Tateishi, Atsuji (Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, JP)
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