Title:
STAGE
Document Type and Number:
WIPO Patent Application WO/2024/070070
Kind Code:
A1
Abstract:
This stage comprises a first metal plate, a second metal plate positioned under the first metal plate, a heat-insulating portion that includes a first space provided in the first metal plate and a second space provided in the second metal plate; and a circulation path and a heater that are disposed with the heat-insulating portion therebetween. In a cross-sectional view, the width of the heat-insulating portion in the first metal plate differs from the width of the heat-insulating portion in the second metal plate.
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Inventors:
FUTAKUCHIYA JUN (JP)
AIKAWA NAOYA (JP)
AIKAWA NAOYA (JP)
Application Number:
PCT/JP2023/021868
Publication Date:
April 04, 2024
Filing Date:
June 13, 2023
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
H01L21/683; H05B3/20
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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