Title:
STAGE
Document Type and Number:
WIPO Patent Application WO/2024/070071
Kind Code:
A1
Abstract:
This stage comprises: a first metal plate having a first groove; a second metal plate positioned under the first metal plate and having a through-opening; a third metal plate positioned under the second metal plate and having a second groove; a heat insulating portion in which the first groove, the through-opening, and the second groove communicate with each other; a first circulation path and a first heater provided in at least one of the first metal plate, the second metal plate, and the third metal plate; and at least one of a second circulation path and a second heater. The first circulation path and the second circulation path are provided in a first region bounded by the heat insulating portion. The first heater and the second heater are provided in a second region bounded by the heat insulating portion opposite the first region.
Inventors:
FUTAKUCHIYA JUN (JP)
AIKAWA NAOYA (JP)
AIKAWA NAOYA (JP)
Application Number:
PCT/JP2023/021870
Publication Date:
April 04, 2024
Filing Date:
June 13, 2023
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
H01L21/683; H05B3/20
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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