STATIC PRESSURE COMPENSATION OF RESONANT INTEGRATED MICROBEAM SENSORS

WIPO Patent Application WO1995003533

A3

A temperature and static pressure compensated differential pressure sensor includes a semiconductor substrate in which a flexible, pressure responsive diaphragm is formed. A pressure responsive resonant microbeam is fabricated at the diaphragm periphery. For temperature compensation, a secondary resonant microbeam sensor is fabricated on the substrate at a peripheral location beyond the point of substrate attachment to a pressure tube or other support. For static pressure compensation, another secondary resonant microbeam can be positioned remote from the diaphragm and at a location of maximum substrate response to static pressure. A further resonant microbeam can be mounted at the diaphragm center to augment the signal due to diaphragm deflections. Also disclosed is an accelerometer including a proof mass, a rigid rim surrounding the proof mass, and a series of narrow, flexible bridges supporting the proof mass relative to the rim. The bridges flex responsive to accelerations, thus to allow the proof mass to move relative to the rim. At least one of the bridges incorporates a resonant microbeam for measuring acceleration by virtue of the induced strain from flexure of its associated bridge. For temperature compensation, a secondary resonant microbeam is fabricated along the rim.

BURNS DAVID W
ZOOK J DAVID

PCT/US1994/008066

March 16, 1995

July 19, 1994

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HONEYWELL INC (US)

G01L1/10; G01D3/028; G01D3/036; G01L1/18; G01L9/00; G01P1/00; G01P15/097; G01P15/10; G01P15/12; (IPC1-7): G01L1/18; G01D3/04

DE4039846A1	1992-06-17
US5165289A	1992-11-24
US5275055A	1994-01-04

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