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Title:
STRUCTURE FOR GROWTH OF NITRIDE SEMICONDUCTOR LAYER, STACKED STRUCTURE, NITRIDE-BASED SEMICONDUCTOR ELEMENT, LIGHT SOURCE, AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2013/021606
Kind Code:
A1
Abstract:
　The structure for the growth of a nitride semiconductor layer disclosed in the present invention is provided with a sapphire substrate having the m-plane as the growth surface, and a plurality of ridge-shaped nitride semiconductor layers formed on the growth surface of the sapphire substrate. The bottom surface of the concave portions disposed between each of the plurality of ridge-shaped nitride semiconductor layers is the m-plane of the sapphire substrate, the growth surface of the plurality of ridge-shaped nitride semiconductor layers is the m-plane, and the absolute value of the angle formed by the direction in which the plurality of ridge-shaped nitride semiconductor layers extend and the c-axis of the sapphire substrate is 0-35 degrees.

Inventors:
CHOE SONGBAEK
YOKOGAWA TOSHIYA
INOUE AKIRA
YAMADA ATSUSHI
Application Number:
PCT/JP2012/004958
Publication Date:
February 14, 2013
Filing Date:
August 03, 2012
Export Citation:
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Assignee:
PANASONIC CORP (JP)
CHOE SONGBAEK
YOKOGAWA TOSHIYA
INOUE AKIRA
YAMADA ATSUSHI
International Classes:
H01L21/205; C30B25/04; C30B25/18; C30B29/38; H01L33/16; H01L33/22; H01L33/50
Domestic Patent References:
WO2008047907A12008-04-24
WO2011125279A12011-10-13
WO2012017686A12012-02-09
WO2008047907A12008-04-24
Foreign References:
JP2005020026A2005-01-20
JP2003063895A2003-03-05
JP2009182340A2009-08-13
JP2008305971A2008-12-18
JP2007184503A2007-07-19
JP2010258459A2010-11-11
JP2002100575A2002-04-05
JP2002016001A2002-01-18
JP2001308462A2001-11-02
JP2003332697A2003-11-21
JP2009295994A2009-12-17
JP2009203151A2009-09-10
JP2009117641A2009-05-28
JP2008305971A2008-12-18
Other References:
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 45, no. 6, 2006, pages L154 - L157
APPLIED PHYSICS LETTERS, vol. 76, 2000, pages 3768
APPLIED PHYSICS LETTERS, vol. 75, 1999, pages 2062
APPLIED PHYSICS LETTERS, vol. 93, 2008, pages 142108
PHYSICA STATUS SOLIDI B, vol. 248, no. 3, 2011, pages 583
APPLIED PHYSICS EXPRESS, vol. 2, 2009, pages 041002
See also references of EP 2701183A4
Attorney, Agent or Firm:
OKUDA, SEIJI (JP)
Seiji Okuda (JP)
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