SUBSTANCE DETECTION SYSTEM AND SUBSTANCE DETECTION METHOD

Title:

SUBSTANCE DETECTION SYSTEM AND SUBSTANCE DETECTION METHOD

Document Type and Number:

WIPO Patent Application WO/2018/087957

Kind Code:

A1

Abstract:

A substance detection system comprising: a reference crystal oscillator and a detection crystal oscillator formed on a single crystal substrate; an oscillation circuit module that sequentially oscillates the reference crystal oscillator and the detection crystal oscillator at a fundamental wave frequency and a third-harmonic wave frequency; a temperature identifying unit that identifies the surface temperature of the crystal substrate on the basis of a differential between a deviation of the fundamental wave frequency relative to a prescribed reference fundamental wave frequency of at least one of the reference crystal oscillator and detection crystal oscillator, and a deviation of the third-harmonic wave frequency relative to a prescribed reference third-harmonic wave frequency; and a substance identifying unit that, on the basis of the difference between the fundamental wave frequency of the reference crystal oscillator and the fundamental wave frequency of the detection crystal oscillator measured by a frequency measuring unit and on the basis of the temperature identified by the temperature identifying unit, identifies a temperature at which a contamination substance adhered to the detection crystal oscillator has detached therefrom and then identifies the contamination substance on the basis of the temperature at which the detachment occurred.

Inventors:

KUKITA HIROYUKI (JP)
WAKAMATSU SHUNICHI (JP)
SHIOBARA TSUYOSHI (JP)
ISHIKAWA TAKAYUKI (JP)
MIYAZAKI EIJI (JP)
TSUCHIYA YUTA (JP)

Application Number:

PCT/JP2017/024718

Publication Date:

May 17, 2018

Filing Date:

July 05, 2017

Export Citation:

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Assignee:

NIHON DEMPA KOGYO CO (JP)
JAPAN AEROSPACE EXPLORATION (JP)

International Classes:

G01N5/04

Foreign References:

JPH01501168A	1989-04-20
JPS6039530A	1985-03-01
JP2014021018A	2014-02-03
JPH01501168A	1989-04-20

Other References:

NAOYUKI IIDA ET AL.: "Development of QCM-based thermal desorption spectroscopy for space applications", 30TH SENSOR SYMPOSIUM ON SENSORS, MICROMACHINES AND APPLIED SYSTEMS RONBUNSHU, 9 November 2013 (2013-11-09), pages 1/4 - 4/4, XP009518276
See also references of EP 3540409A4