Title:
SUBSTRATE CONVEYING DEVICE, AND SUBSTRATE POSITIONAL DISPLACEMENT MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/161582
Kind Code:
A1
Abstract:
A substrate conveying device (1) is provided with a robot (10) having a hand (12) for holding a substrate (W) and an arm (11) for moving the hand (12), a robot control device (15) for setting a travel path (T) of the hand (12) and controlling the arm (11) in such a way that the hand (12) travels along the travel path (T) toward a target position (Py), and a camera (6) installed in such a way as to be capable of imaging the substrate (W) held by the hand (12) positioned in a prescribed verification position (Px), wherein the robot control device (15): sets the travel path (T) in such a way as to pass through the verification position (Px); acquires an image (G) captured by the camera (6) when the hand (12) is positioned in the verification position (Px); calculates the distance between the substrate (W) appearing in the image (G) and a predetermined environment; and calculates an amount of positional displacement (L) of the substrate (W) from a reference position (S) on the basis of the distance.
Inventors:
YOSHIDA MASAYA
BHARWANI AVISH ASHOK
ZENG MING
JEYAPALAN SIMON
NAKAHARA HAJIME
BHARWANI AVISH ASHOK
ZENG MING
JEYAPALAN SIMON
NAKAHARA HAJIME
Application Number:
PCT/JP2020/038033
Publication Date:
August 19, 2021
Filing Date:
October 07, 2020
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
KAWASAKI ROBOTICS USA INC (US)
KAWASAKI ROBOTICS USA INC (US)
International Classes:
H01L21/677
Foreign References:
| JP2009218622A | 2009-09-24 |
Attorney, Agent or Firm:
ARCO PATENT & TRADEMARK ATTORNEYS (JP)
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