Title:
SUBSTRATE HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/244880
Kind Code:
A1
Abstract:
The purpose of the present invention is to make it possible, even when the size, material and the like of a substrate to be processed have been modified, to adjust the position for supporting the substrate, in accordance with the substrate after the modification. This substrate holding device is provided with: a frame body on which a substrate transferred by means of a transfer device is mounted; and a substrate handover mechanism which hands over to the frame body the substrate that has been transferred above the frame body by means of the transfer device. The substrate handover mechanism is provided with: a support pin arranged under the frame body; a support pin extend/retract mechanism which extends and retracts the support pin between a support pin lifting/lowering position set under and inside the frame of the frame body, and a support pin withdrawn position set outside the frame of the frame body; and a support pin lifting/lowering mechanism by which the support pin that has been arranged in the support pin lifting/lowering position by means of the support pin extend/retract mechanism is lifted through the frame of the frame body so as to support the substrate, and then lowered.
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Inventors:
IRISAWA KAZUHIKO (JP)
Application Number:
PCT/JP2019/024073
Publication Date:
December 26, 2019
Filing Date:
June 18, 2019
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD (JP)
International Classes:
H01L21/683; H01L21/677
Foreign References:
| JP2010098048A | 2010-04-30 | |||
| JP2002334922A | 2002-11-22 | |||
| JP2003270155A | 2003-09-25 | |||
| JP2010062317A | 2010-03-18 | |||
| JP2008204996A | 2008-09-04 | |||
| JP2009055046A | 2009-03-12 |
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