Title:
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/124521
Kind Code:
A1
Abstract:
Provided is a substrate inspection apparatus capable of easily inspecting a large-sized substrate for defects. The substrate inspection apparatus (100) for detecting defects in a substrate (10) comprises: a robot hand (20) for conveying a substrate (10); an illumination apparatus (32) disposed above a substrate (10), the substrate being supported by the robot hand (20); and a plurality of cameras (34) (34a-34c) for taking an image of a surface (10a) of the substrate (10) using irradiated light (33) from the illumination apparatus (32). The plurality of cameras (34) (34a-34c) takes an image of the entire area of the substrate (10).
Inventors:
MATSUI YOSHIKAZU
Application Number:
PCT/JP2012/055559
Publication Date:
September 20, 2012
Filing Date:
March 05, 2012
Export Citation:
Assignee:
SHARP KK (JP)
MATSUI YOSHIKAZU
MATSUI YOSHIKAZU
International Classes:
G01N21/958; G01M11/00; G02F1/13; G09F9/00
Foreign References:
| JP2006251480A | 2006-09-21 | |||
| JP2006242714A | 2006-09-14 | |||
| JP2002516238A | 2002-06-04 |
Attorney, Agent or Firm:
TESHIMA MASARU (JP)
Masaru Tejima (JP)
Masaru Tejima (JP)
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Claims:
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