Title:
SUBSTRATE INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/174114
Kind Code:
A1
Abstract:
Provided is an optical inspection device capable of separating a front and back side of a substrate under inspection and maintaining inspection accuracy even if the substrate becomes thin. More specifically, a substrate inspection device provided with a substrate holding part, illumination unit, imaging unit, and inspection unit, wherein: the illumination unit is disposed so as to irradiate illumination light at a prescribed angle with respect to a first surface of a substrate; the imaging unit is provided with a substrate first surface imaging unit for observing, from the side of the first surface, a first-surface-side area under inspection set on the first surface side of the substrate and a substrate second surface imaging unit for observing, from the side of the first surface, a second-surface-side area under inspection set on a second surface side that faces and is opposite from the first surface of the substrate; the first surface imaging unit is disposed so as to image the first-surface-side area under inspection at a prescribed angle with respect to the first surface of the substrate; and the second surface imaging unit is disposed so as to image the second-surface-side area under inspection at a prescribed angle with respect to the second surface of the substrate.
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Inventors:
UEDA HIROYUKI (JP)
TACHIBANA YOSHIHIRO (JP)
IMAMURA AKIHIDE (JP)
KIMURA TOSHIHIRO (JP)
TACHIBANA YOSHIHIRO (JP)
IMAMURA AKIHIDE (JP)
KIMURA TOSHIHIRO (JP)
Application Number:
PCT/JP2015/054909
Publication Date:
November 19, 2015
Filing Date:
February 23, 2015
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
G01N21/958
Foreign References:
| JPH0882602A | 1996-03-26 | |||
| JP2013140061A | 2013-07-18 |
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