SUBSTRATE PROCESSING DEVICE, CONTROLLER, AND RECORDING MEDIUM

WIPO Patent Application WO/2017/158682

A1

Provided is a configuration comprising: a screen control unit for displaying on a display unit a maintenance component management screen that displays, as a maintenance component, a component or a mechanism selected as an object to be managed from each component or each mechanism constituted by a plurality of components constituting a device; a collection unit for collecting component data related to the maintenance component; a determination unit for comparing the cumulative value of the component data with a pre-set threshold value, and if said threshold value has been exceeded, determining a replacement time; a calculation unit for calculating the replacement time; and an operation unit configured to control each of the screen control unit, the collection unit, the determination unit, and the calculation unit, to, regarding the component data of the mechanism and components constituting said mechanism, calculate the replacement time for each on the basis of the average value of the component data at each prescribed cycle and the cumulative value of the component data, and to display on the display unit, in an updated state, the maintenance component displayed on the maintenance component management screen so as to be arranged sequentially from the top from the maintenance part, which includes the most recent replacement time.

FUKUDA MITSURU (JP)
HOSOKAWA RISA (JP)

PCT/JP2016/057973

September 21, 2017

March 14, 2016

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HITACHI INT ELECTRIC INC (JP)

H01L21/02

JP2000124094A	2000-04-28
JP2012123311A	2012-06-28
JP2005195401A	2005-07-21
JP2008127129A	2008-06-05
JP2003257808A	2003-09-12

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