Title:
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/059546
Kind Code:
A1
Abstract:
The purpose of the present invention is to reduce the amount of data used by a device and a system that perform substrate processing and in a method for performing substrate processing. A substrate processing device that comprises: one or more processing units that perform processing on a substrate; and one or more computational processing parts. By combining two or more processing recipes from among a plurality of processing recipes that each stipulate processing conditions for processing that is to be performed on the substrate at the one or more processing units, the one or more computational processing parts create a flow recipe that stipulates the flow of a series of processes for the substrate. The plurality of processing recipes include a plurality of liquid processing recipes that each establish conditions for processing that is to be performed on the substrate using a processing liquid.
Inventors:
HASHIMOTO KOJI (JP)
SHIMIZU SHINJI (JP)
HORIGUCHI HIROSHI (JP)
YAMAMOTO MASAHIRO (JP)
SHIMIZU SHINJI (JP)
HORIGUCHI HIROSHI (JP)
YAMAMOTO MASAHIRO (JP)
Application Number:
PCT/JP2019/035229
Publication Date:
March 26, 2020
Filing Date:
September 06, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02; H01L21/304
Foreign References:
| JP2011077243A | 2011-04-14 | |||
| JP2007123734A | 2007-05-17 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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