Title:
SUBSTRATE-STORING CONTAINER
Document Type and Number:
WIPO Patent Application WO/2019/097862
Kind Code:
A1
Abstract:
Provided is a substrate-storing container that allows efficient transmission of pressing force from substrate-holding sections to substrate-receiving sections when a lid body is attached to a container body and a substrate is lifted from support sections and supported. A substrate-storing container 1 is a substrate-storing container 1 provided with: a container body 10 that has an opening 11 in the front and on inner sides of which support sections 12 for supporting a substrate W and substrate-receiving sections 13 are formed, said substrate-receiving sections 13 being located closer to a back face wall than the support sections 12 are; and a lid body 20 having a holding member 21 in which substrate-holding sections 210 for holding the substrate W are formed. In the front view of the lid body 20, the substrate-receiving sections 13 and the substrate-holding sections 210 are located within a range of 0-80 mm inclusive in the left and right directions relative to a vertical-direction centerline Z (Y) passing through the center C of the container body 10.
Inventors:
ONUKI KAZUMASA (JP)
MIMURA HIROSHI (JP)
TODA JUNYA (JP)
SUDA TAKASHI (JP)
MIMURA HIROSHI (JP)
TODA JUNYA (JP)
SUDA TAKASHI (JP)
Application Number:
PCT/JP2018/036714
Publication Date:
May 23, 2019
Filing Date:
October 01, 2018
Export Citation:
Assignee:
SHINETSU POLYMER CO (JP)
International Classes:
H01L21/673; B65D85/30
Domestic Patent References:
| WO2014080454A1 | 2014-05-30 | |||
| WO2011052998A2 | 2011-05-05 | |||
| WO2011132257A1 | 2011-10-27 | |||
| WO2011148450A1 | 2011-12-01 |
Foreign References:
| JP2011253960A | 2011-12-15 | |||
| JP2017527997A | 2017-09-21 | |||
| JP2011060994A | 2011-03-24 |
Attorney, Agent or Firm:
SAKAMOTO Tomohiro (JP)
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