SUBSTRATE SUPPORT DEVICE, DISPLAY PANEL MANUFACTURING APPARATUS AND SUBSTRATE SUPPORT METHOD

Title:

SUBSTRATE SUPPORT DEVICE, DISPLAY PANEL MANUFACTURING APPARATUS AND SUBSTRATE SUPPORT METHOD

Document Type and Number:

WIPO Patent Application WO/2019/052238

Kind Code:

A1

Abstract:

A substrate support device (100), a display panel manufacturing apparatus and a substrate support method. The substrate support device (100) comprises: a carrying mechanism (10) configured to carry a substrate (200), the carrying mechanism (10) being provided with a through hole (12); one or more adhesive pads (20) located on the carrying mechanism (10), surrounding the through hole (12), and configured to fix the substrate (200) on the carrying mechanism (10); and a lifting mechanism (30) configured to control the lifting of the substrate (200) by passing through the through hole (12), wherein a light-emitting member (32) is provided at the top of the lifting mechanism (30) and emits light when in contact with the substrate (200), to irradiate the adhesive pads (20), so that the viscidity of the adhesive pad (20) is reduced from the first viscidity to the second viscidity.

Inventors:

ZOU QINGHUA (CN)
GUO SHUPENG (CN)
DUAN TINGYUAN (CN)
YAO GU (CN)
ZHU RUHUI (CN)
WANG YU (CN)

Application Number:

PCT/CN2018/090429

Publication Date:

March 21, 2019

Filing Date:

June 08, 2018

Export Citation:

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Assignee:

BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)

International Classes:

H01L21/683

Foreign References:

JP2013055093A	2013-03-21
CN101859728A	2010-10-13
JPH11111875A	1999-04-23
KR20120136001A	2012-12-18

Other References: