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Title:
SUBSTRATE TRANSFER APPARATUS, SYSTEM FOR MANUFACTURING ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/023156
Kind Code:
A1
Abstract:
A substrate transfer apparatus comprising a first substrate holder and a second substrate holder that are capable of holding a substrate is provided with: a first drive arm having a first end portion and a second end portion and being rotatable by the rotation of a first drive shaft; a second drive arm having a third end portion located at a first distance from the first end portion and a fourth end portion located at a second distance from the second end portion and being rotatable by the rotation of a second drive shaft coaxial with the first drive shaft; two first driven arms coupled to the first substrate holder; and two second driven arms coupled to the second substrate holder.

Inventors:
WATANABE KAZUHITO (JP)
TASIRO YUKIHITO (JP)
NAKAMURA SATOSHI (JP)
KOBINATA DAISUKE (JP)
SASAKI TOSHIAKI (JP)
NOZAWA NAOYUKI (JP)
Application Number:
PCT/JP2010/005082
Publication Date:
February 23, 2012
Filing Date:
August 17, 2010
Export Citation:
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Assignee:
CANON ANELVA CORP (JP)
WATANABE KAZUHITO (JP)
TASIRO YUKIHITO (JP)
NAKAMURA SATOSHI (JP)
KOBINATA DAISUKE (JP)
SASAKI TOSHIAKI (JP)
NOZAWA NAOYUKI (JP)
International Classes:
H01L21/677; B25J9/06
Foreign References:
JP2002503561A2002-02-05
JPH11216691A1999-08-10
Attorney, Agent or Firm:
OHTSUKA, YASUNORI (JP)
Yasunari Otsuka (JP)
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Claims:



 
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