Title:
SUBSTRATE TRANSIT DEVICE AND SUBSTRATE HANDLING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2014/000199
Kind Code:
A1
Abstract:
A substrate transit device (1) and a substrate handling system comprising the substrate transit device (1). The substrate transit device (1) comprises a docking mechanism (11) and a delivery platform (12). The docking mechanism (11) is used to transport the delivery platform (12), so that the delivery platform (12) is docked to a substrate output device (2) and a substrate input device (3). The delivery platform (12) is used to receive a substrate (4) output by the substrate output device (2) when docked with the substrate output device (2), and transport the substrate (4) horizontally, so as to input the substrate (4) into the substrate input device (3) when docked with the substrate input device (3). The substrate handling system comprises the substrate output device (2), the substrate input device (3), and the substrate transit device (1) disposed between the substrate output device (2) and the substrate input device (3). The substrate handling system is provided with the delivery platform (12), and the delivery platform receives, delivers, and outputs the substrate (4), so that the substrate output device (2) does not need to be provided with a substrate collection area, thereby effectively reducing the area occupied by a workshop.
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Inventors:
YANG WEIBING (CN)
WU CHUNHAO (CN)
LIN KUNHSIEN (CN)
WANG YONGQIANG (CN)
SHU ZHIYOU (CN)
LI XIANDE (CN)
QI MINGHU (CN)
CHEN ZENGHONG (CN)
GUO ZHENHUA (CN)
JIANG YUNSHAO (CN)
WU CHUNHAO (CN)
LIN KUNHSIEN (CN)
WANG YONGQIANG (CN)
SHU ZHIYOU (CN)
LI XIANDE (CN)
QI MINGHU (CN)
CHEN ZENGHONG (CN)
GUO ZHENHUA (CN)
JIANG YUNSHAO (CN)
Application Number:
PCT/CN2012/077687
Publication Date:
January 03, 2014
Filing Date:
June 28, 2012
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
YANG WEIBING (CN)
WU CHUNHAO (CN)
LIN KUNHSIEN (CN)
WANG YONGQIANG (CN)
SHU ZHIYOU (CN)
LI XIANDE (CN)
QI MINGHU (CN)
CHEN ZENGHONG (CN)
GUO ZHENHUA (CN)
JIANG YUNSHAO (CN)
YANG WEIBING (CN)
WU CHUNHAO (CN)
LIN KUNHSIEN (CN)
WANG YONGQIANG (CN)
SHU ZHIYOU (CN)
LI XIANDE (CN)
QI MINGHU (CN)
CHEN ZENGHONG (CN)
GUO ZHENHUA (CN)
JIANG YUNSHAO (CN)
International Classes:
B65G49/06; B65G47/52; G02F1/1333; H01L21/677
Foreign References:
| CN102464210A | 2012-05-23 | |||
| JP2006151524A | 2006-06-15 | |||
| CN201638799U | 2010-11-17 | |||
| CN100407395C | 2008-07-30 | |||
| US5564889A | 1996-10-15 | |||
| CN100352000C | 2007-11-28 | |||
| CN201990257U | 2011-09-28 | |||
| CN100583391C | 2010-01-20 | |||
| CN102249064A | 2011-11-23 |
Attorney, Agent or Firm:
CHINA WISPRO INTELLECTUAL PROPERTY LLP. (CN)
深圳市威世博知识产权代理事务所（普通合伙） (CN)
深圳市威世博知识产权代理事务所（普通合伙） (CN)
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