Title:
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENT END EFFECTORS
Document Type and Number:
WIPO Patent Application WO2003006216
Kind Code:
A8
Abstract:
A substrate processing apparatus (10) comprising a frame (16), a drive section (42), an articulated arm (44), and at least one pair of end effectors (64, 66). The drive section (42) is connected to the frame (16). The articulated arm (44) is connected to the drive section (42). The articulated arm (44) has a shoulder (72) and a wrist. The arm (44) is pivotally mounted to the drive section (42) at the shoulder (72). The pair of end effectors (64, 66) is connected to the articulated arm (44). The pair of end effectors (64, 66) is pivotally jointed to the wrist of the articulated arm (44) to rotate relative to the articulated arm (44) about a common axis of rotation at the wrist. Each end effector (64, 66) is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm (44).
Inventors:
GILCHRIST ULYSSES
Application Number:
PCT/US2002/022476
Publication Date:
December 04, 2003
Filing Date:
July 15, 2002
Export Citation:
Assignee:
BROOKS AUTOMATION INC (US)
International Classes:
B25J9/06; B25J9/04; B25J9/10; B25J15/00; B25J17/02; B25J18/04; H01L21/677; (IPC1-7): B25J15/02; G05B19/04
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