Title:
SUBSTRATE TRANSPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2013/190800
Kind Code:
A1
Abstract:
The system is provided with: a substrate delivery unit (2) including a moveable rack (21) and a lifting/lowering unit (22) for lowering the moveable rack (21); a levitation unit (3) including one or more outlets (35) for blowing a gas upward, the outlets being constituted such that a substrate supported on the moveable rack is levitated by the pressure of the gas blown from the outlets once the moveable rack has been lowered by the lifting/lowering unit; and a transport unit (4) including a transport conveyor (40) and claw parts (41) that stand upright from the transport conveyor, and constituted such that the claw parts push, in the direction of transport, a substrate (W) that is being levitated by the pressure of the gas blown from the outlets.
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Inventors:
BANDO KENJI
FUKUDA TAKUYA
TAMADA SOICHI
FUKUDA TAKUYA
TAMADA SOICHI
Application Number:
PCT/JP2013/003636
Publication Date:
December 27, 2013
Filing Date:
June 10, 2013
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B65G19/02; B65G49/06
Foreign References:
| JP2005136411A | 2005-05-26 | |||
| JP2010260658A | 2010-11-18 | |||
| JP2007250871A | 2007-09-27 | |||
| JP2008505041A | 2008-02-21 | |||
| JPH01297835A | 1989-11-30 | |||
| JP2008098198A | 2008-04-24 |
Other References:
See also references of EP 2866252A4
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
Patent business corporation Owner old patent firm (JP)
Patent business corporation Owner old patent firm (JP)
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