Title:
SURFACE ACOUSTIC WAVE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/172251
Kind Code:
A1
Abstract:
The invention lowers the cost of a surface acoustic wave apparatus using a scandium-containing aluminum nitride film. A surface acoustic wave apparatus (1) in which a high acoustic velocity film (3) having a propagation lateral wave acoustic velocity higher than a ScA1N film (4) is layered on a substrate (2) comprising silicon or glass, the ScA1N film (4) being layered on the high acoustic velocity film (3), and IDT electrodes (5, 6) being layered on the ScA1N film (4).
Inventors:
UMEDA KEIICHI (JP)
NAKAGAWA RYO (JP)
TANAKA ATSUSHI (JP)
NAKAGAWA RYO (JP)
TANAKA ATSUSHI (JP)
Application Number:
PCT/JP2013/063078
Publication Date:
November 21, 2013
Filing Date:
May 09, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Foreign References:
| JPH08316782A | 1996-11-29 | |||
| JP2009010926A | 2009-01-15 | |||
| JP2005354650A | 2005-12-22 | |||
| JP2006270360A | 2006-10-05 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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