Title:
SURFACE MODIFICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/196580
Kind Code:
A1
Abstract:
The present invention improves the adhesiveness of an object to be treated comprising a fluorine-based material having poor adhesiveness. A process gas containing one or more of carbon monoxide, carbon dioxide, hydrogen, water vapor, ethanol, propanol, hexanol, ethylene glycol and ammonia is supplied from a process gas supply unit 10 to a plasma generation unit 20. In the plasma generation unit 20, the process gas is activated by plasma and brought into contact with an object to be treated 9. As a result of the reaction by this contact, the proportion of fluorine atoms remaining on the surface of the object to be treated 9 is brought to 60% or less the amount before the contact, and one of carbon atoms, hydrogen atoms and oxygen atoms, or molecules containing one or more of these atoms, is provided to the surface of the object to be treated.
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Inventors:
MIYAMOTO EIJI (JP)
AKAHORI MASATO (JP)
KONDO HIDEKI (JP)
HINO MAMORU (JP)
AKAHORI MASATO (JP)
KONDO HIDEKI (JP)
HINO MAMORU (JP)
Application Number:
PCT/JP2022/011062
Publication Date:
September 22, 2022
Filing Date:
March 11, 2022
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD (JP)
International Classes:
H05H1/24; B01J19/08; C08J7/00
Domestic Patent References:
| WO2019124321A1 | 2019-06-27 |
Foreign References:
| JP2002020514A | 2002-01-23 | |||
| JP2019137731A | 2019-08-22 | |||
| JP2016030769A | 2016-03-07 | |||
| JPH06228343A | 1994-08-16 | |||
| JP2006294571A | 2006-10-26 |
Attorney, Agent or Firm:
YOUSEN PATENT ATTORNEYS AND ASSOCIATES (JP)
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