Title:
SURFACE STRESS SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/148774
Kind Code:
A1
Abstract:
A surface stress sensor is configured so that the deflection of the free end of one plate-like member, which is caused by uniform stress, is transmitted to the other plate-like member by moving the free end of the other plate-like member. Uniform stress applied to said plate-like member is converted into stress induced by a point force in the other plate-like member, and then the induced stress concentrates on an affixed end-side narrow portion to which piezoresistance is provided. Thus, a novel structure for a piezoresistance surface stress sensor is provided, the surface stress sensor being highly sensitive to uniform stress applied to the sensor surface.
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Inventors:
YOSHIKAWA GENKI (JP)
ROHRER HEINRICH (JP)
AKIYAMA TERUNOBU (CH)
PETER VETTIGER (CH)
ROHRER HEINRICH (JP)
AKIYAMA TERUNOBU (CH)
PETER VETTIGER (CH)
Application Number:
PCT/JP2011/060673
Publication Date:
December 01, 2011
Filing Date:
May 09, 2011
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
YOSHIKAWA GENKI (JP)
ROHRER HEINRICH (JP)
AKIYAMA TERUNOBU (CH)
PETER VETTIGER (CH)
YOSHIKAWA GENKI (JP)
ROHRER HEINRICH (JP)
AKIYAMA TERUNOBU (CH)
PETER VETTIGER (CH)
International Classes:
H01L29/84; G01L1/18
Foreign References:
| JPS5965232A | 1984-04-13 | |||
| JPS49132989A | 1974-12-20 | |||
| JPS6312930A | 1988-01-20 | |||
| JPH06230023A | 1994-08-19 | |||
| JPS5623316B2 | 1981-05-30 |
Other References:
FRITZ, J.; BALLER, M. K.; LANG, H. P.; ROTHUIZEN, H.; VETTIGER, P.; MEYER, E.; GUNTHERODT, H. J.; GERBER, C.; GIMZEWSKI, J. K., SCIENCE, vol. 288, 2000, pages 316
MCKENDRY, R.; ZHANG, J. Y.; ARNTZ, Y.; STRUNZ, T.; HEGNER, M.; LANG, H. P.; BALLER, M. K.; CERTA, U.; MEYER, E.; GUNTHERODT, H. J., PROC. NATL. ACAD. SCI. U. S. A., vol. 99, 2002, pages 9783
SEELIG, J. D.; LANG, H. P.; ZHANG, J.; HUNZIKER, P.; RAMSEYER, J. P.; MEYER, E.; HEGNER, M.; GERBER, C., NANOTECHNOLOGY, vol. 14, 2003, pages 86
BACKMANN, N.; ZAHND, C.; HUBER, F.; BIETSCH, A.; PLUCKTHUN, A.; LANG, H. P.; GUNTHERODT, H. J.; HEGNER, M.; GERBER, C., PROC. NATL. ACAD. SCI. U. S. A., vol. 102, 2005, pages 14587
ZHANG, J.; LANG, H. P.; HUBER, F.; BIETSCH, A.; GRANGE, W.; CERTA, U.; MCKENDRY, R.; GUENTHERODT, H.-J.; HEGNER, M.; GERBER, C., NAT. NANOTECHNOL., vol. 1, 2006, pages 214
WATARI, M.; GALBRAITH, J.; LANG, H. P.; SOUSA, M.; HEGNER, M.; GERBER, C.; HORTON, M. A.; MCKENDRY, R. A., J. AM. CHEM. SOC., vol. 129, 2007, pages 601
YOSHIKAWA, G.; LANG, H.-P.; AKIYAMA, T.; AESCHIMANN, L.; STAUFER, U.; VETTIGER, P.; AONO, M.; SAKURAI, T.; GERBER, C., NANOTECHNOLOGY, vol. 20, 2009, pages 015501
YU, X. M.; THAYSEN, J.; HANSEN, O.; BOISEN, A., J. APPL. PHYS., vol. 92, 2002, pages 6296
CHOUDHURY, A.; HESKETH, P. J.; THUNDAT, T.; HU, Z. Y., J. MICROMECH. MICROENG., vol. 17, 2007, pages 2065
PRIVOROTSKAYA, N. L.; KING, W. P., MICROSYST TECHNOL, vol. 15, 2008, pages 333
RASMUSSEN, P. A.; HANSEN, O.; BOISEN, A., APPL. PHYS. LETT., vol. 86, 2005, pages 203502
SADER, J. E., J. APPL. PHYS., vol. 89, 2001, pages 2911
YANG, S. M.; YIN, T. I.; CHANG, C., SENS. ACTUATORS B, vol. 121, 2007, pages 545
KANDA, Y., IEEE TRANS. ELECTRON DEVICES, vol. 29, 1982, pages 64
KANDA, Y., SENS. ACTUATORS A, vol. 28, 1991, pages 83
PFANN, W. G.; THURSTON, R. N., J. APPL. PHYS., vol. 32, 1961, pages 2008
STONEY, G. G., PROC. R. SOC. LONDON, SER. A, vol. 82, 1909, pages 172
AESCHIMANN, L.; MEISTER, A; AKIYAMA, T.; CHUI, B. W.; NIEDERMANN, P.; HEINZELMANN, H.; DE ROOIJ, N. F.; STAUFER, U.; VETTIGER, P., MICROELECTRON. ENG., vol. 83, 2006, pages 1698
AESCHIMANN, L.; GOERICKE, F.; POLESEL-MARIS, J.; MEISTER, A.; AKIYAMA, T.; CHUI, B.; STAUFER, U.; PUGIN, R.; HEINZELMANN, H.; ROOI, J. PHYS., vol. 61, 2007, pages 6
BINNIG G; QUATE C F; GERBER C, ATOMIC FORCE MICROSCOPE PHYS. REV. LETT., vol. 56, 1986, pages 930 - 3
DRAKE B; PRATER C B; WEISENHORN A L; GOULD S A C; ALBRECHT T R; QUATE C F; CANNELL D S; HANSMA H G; HANSMA P K: "Imaging Crystals, Polymers, and Processes in Water with the Atomic Force Microscope", SCIENCE, vol. 243, 1989, pages 1586 - 9, XP000566320, DOI: doi:10.1126/science.2928794
RUGAR D; MAMIN H J; GUETHNER P: "Improved Fiber-Optic Interferometer for Atomic Force Microscopy", APPL. PHYS. LETT., vol. 55, 1989, pages 2588 - 90, XP000126805, DOI: doi:10.1063/1.101987
MARTIN Y; WILLIAMS C C; WICKRAMASINGHE H K: "Atomic Force Microscope Force Mapping and Profiling on a Sub 100-a Scale", J. APPL. PHYS., vol. 61, 1987, pages 4723 - 9, XP000992634, DOI: doi:10.1063/1.338807
YOSHIKAWA G; LANG H-P; AKIYAMA T; AESCHIMANN L; STAUFER U; VETTIGER P; AONO M; SAKURAI T; GERBER C: "Sub-ppm detection of vapors using piezoresistive microcantilever array sensors", NANOTECHNOLOGY, vol. 20, 2009, pages 015501
TORTONESE M; BARRETT R C; QUATE C F: "ATOMIC RESOLUTION WITH AN ATOMIC FORCE MICROSCOPE USING PIEZORESISTIVE DETECTION", APPL. PHYS. LETT., vol. 62, 1993, pages 834 - 6, XP000338616, DOI: doi:10.1063/1.108593
VETTIGER P ET AL.: "The ''millipede'' - Nanotechnology entering data storage IEEE Trans.", NANOTECHNOL., vol. 1, 2002, pages 39 - 55
See also references of EP 2579010A4
MCKENDRY, R.; ZHANG, J. Y.; ARNTZ, Y.; STRUNZ, T.; HEGNER, M.; LANG, H. P.; BALLER, M. K.; CERTA, U.; MEYER, E.; GUNTHERODT, H. J., PROC. NATL. ACAD. SCI. U. S. A., vol. 99, 2002, pages 9783
SEELIG, J. D.; LANG, H. P.; ZHANG, J.; HUNZIKER, P.; RAMSEYER, J. P.; MEYER, E.; HEGNER, M.; GERBER, C., NANOTECHNOLOGY, vol. 14, 2003, pages 86
BACKMANN, N.; ZAHND, C.; HUBER, F.; BIETSCH, A.; PLUCKTHUN, A.; LANG, H. P.; GUNTHERODT, H. J.; HEGNER, M.; GERBER, C., PROC. NATL. ACAD. SCI. U. S. A., vol. 102, 2005, pages 14587
ZHANG, J.; LANG, H. P.; HUBER, F.; BIETSCH, A.; GRANGE, W.; CERTA, U.; MCKENDRY, R.; GUENTHERODT, H.-J.; HEGNER, M.; GERBER, C., NAT. NANOTECHNOL., vol. 1, 2006, pages 214
WATARI, M.; GALBRAITH, J.; LANG, H. P.; SOUSA, M.; HEGNER, M.; GERBER, C.; HORTON, M. A.; MCKENDRY, R. A., J. AM. CHEM. SOC., vol. 129, 2007, pages 601
YOSHIKAWA, G.; LANG, H.-P.; AKIYAMA, T.; AESCHIMANN, L.; STAUFER, U.; VETTIGER, P.; AONO, M.; SAKURAI, T.; GERBER, C., NANOTECHNOLOGY, vol. 20, 2009, pages 015501
YU, X. M.; THAYSEN, J.; HANSEN, O.; BOISEN, A., J. APPL. PHYS., vol. 92, 2002, pages 6296
CHOUDHURY, A.; HESKETH, P. J.; THUNDAT, T.; HU, Z. Y., J. MICROMECH. MICROENG., vol. 17, 2007, pages 2065
PRIVOROTSKAYA, N. L.; KING, W. P., MICROSYST TECHNOL, vol. 15, 2008, pages 333
RASMUSSEN, P. A.; HANSEN, O.; BOISEN, A., APPL. PHYS. LETT., vol. 86, 2005, pages 203502
SADER, J. E., J. APPL. PHYS., vol. 89, 2001, pages 2911
YANG, S. M.; YIN, T. I.; CHANG, C., SENS. ACTUATORS B, vol. 121, 2007, pages 545
KANDA, Y., IEEE TRANS. ELECTRON DEVICES, vol. 29, 1982, pages 64
KANDA, Y., SENS. ACTUATORS A, vol. 28, 1991, pages 83
PFANN, W. G.; THURSTON, R. N., J. APPL. PHYS., vol. 32, 1961, pages 2008
STONEY, G. G., PROC. R. SOC. LONDON, SER. A, vol. 82, 1909, pages 172
AESCHIMANN, L.; MEISTER, A; AKIYAMA, T.; CHUI, B. W.; NIEDERMANN, P.; HEINZELMANN, H.; DE ROOIJ, N. F.; STAUFER, U.; VETTIGER, P., MICROELECTRON. ENG., vol. 83, 2006, pages 1698
AESCHIMANN, L.; GOERICKE, F.; POLESEL-MARIS, J.; MEISTER, A.; AKIYAMA, T.; CHUI, B.; STAUFER, U.; PUGIN, R.; HEINZELMANN, H.; ROOI, J. PHYS., vol. 61, 2007, pages 6
BINNIG G; QUATE C F; GERBER C, ATOMIC FORCE MICROSCOPE PHYS. REV. LETT., vol. 56, 1986, pages 930 - 3
DRAKE B; PRATER C B; WEISENHORN A L; GOULD S A C; ALBRECHT T R; QUATE C F; CANNELL D S; HANSMA H G; HANSMA P K: "Imaging Crystals, Polymers, and Processes in Water with the Atomic Force Microscope", SCIENCE, vol. 243, 1989, pages 1586 - 9, XP000566320, DOI: doi:10.1126/science.2928794
RUGAR D; MAMIN H J; GUETHNER P: "Improved Fiber-Optic Interferometer for Atomic Force Microscopy", APPL. PHYS. LETT., vol. 55, 1989, pages 2588 - 90, XP000126805, DOI: doi:10.1063/1.101987
MARTIN Y; WILLIAMS C C; WICKRAMASINGHE H K: "Atomic Force Microscope Force Mapping and Profiling on a Sub 100-a Scale", J. APPL. PHYS., vol. 61, 1987, pages 4723 - 9, XP000992634, DOI: doi:10.1063/1.338807
YOSHIKAWA G; LANG H-P; AKIYAMA T; AESCHIMANN L; STAUFER U; VETTIGER P; AONO M; SAKURAI T; GERBER C: "Sub-ppm detection of vapors using piezoresistive microcantilever array sensors", NANOTECHNOLOGY, vol. 20, 2009, pages 015501
TORTONESE M; BARRETT R C; QUATE C F: "ATOMIC RESOLUTION WITH AN ATOMIC FORCE MICROSCOPE USING PIEZORESISTIVE DETECTION", APPL. PHYS. LETT., vol. 62, 1993, pages 834 - 6, XP000338616, DOI: doi:10.1063/1.108593
VETTIGER P ET AL.: "The ''millipede'' - Nanotechnology entering data storage IEEE Trans.", NANOTECHNOL., vol. 1, 2002, pages 39 - 55
See also references of EP 2579010A4
Attorney, Agent or Firm:
NISHIZAWA TOSHIO (JP)
Toshio Nishizawa (JP)
Toshio Nishizawa (JP)
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