Title:
SURFACE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/162503
Kind Code:
A1
Abstract:
A surface treatment device (1) comprises: a treatment electrode such as a plasma electrode (50) or a sputter electrode (80); a barrel (100) (accommodation unit) that is installed in a position facing the treatment electrode and is rotatable around a rotational axis (113) which is inclined with respect to the horizontal direction in a state in which a material to be processed (W) is accommodated therein; a chamber (10) accommodating the treatment electrode and the barrel; a surface treatment means such as a plasma treatment device (40) or a sputtering device (70) that performs a surface treatment on the material to be processed accommodated in the barrel and includes the treatment electrode; and a servo motor (120) (rotation means) that rotates the barrel around the rotational axis when the surface treatment means performs the surface treatment on the material to be processed.
Inventors:
NAMBA TAKESHI (JP)
FUKADA KAZUHIRO (JP)
KURIHARA YOSHIAKI (JP)
FUKADA KAZUHIRO (JP)
KURIHARA YOSHIAKI (JP)
Application Number:
PCT/JP2023/000971
Publication Date:
August 31, 2023
Filing Date:
January 16, 2023
Export Citation:
Assignee:
SHIBAURA MACHINE CO LTD (JP)
International Classes:
B01J19/08; C23C14/50; C23C14/02
Domestic Patent References:
| WO2021251395A1 | 2021-12-16 |
Foreign References:
| JP2007204784A | 2007-08-16 | |||
| JPH11241157A | 1999-09-07 | |||
| JP2012007230A | 2012-01-12 | |||
| CN103103481A | 2013-05-15 | |||
| JP2001336533A | 2001-12-07 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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