Title:
SUSCEPTOR FOR EPITAXIAL GROWING AND METHOD FOR EPITAXIAL GROWING
Document Type and Number:
WIPO Patent Application WO/2014/062000
Kind Code:
A1
Abstract:
The present invention relates to a susceptor for epitaxial growing, which is for manufacturing an epitaxial wafer made by performing a reaction of a wafer and a source gas inside a chamber and growing an epitaxial layer, comprising: a pocket provided with an opening on which the wafer is arranged; a ledge portion for supporting the wafer; and a gas control member positioned on the outer circumferential portion of the upper surface of the susceptor opening, wherein the gas control member comprises a first gas control member which is formed on a predetermined area opposite a crystalline direction of the wafer (110), a second gas control member which is formed on a predetermined area opposite the crystalline direction of the wafer (100), and a third gas control member which is formed between the first gas control member and the second gas control member, wherein the first gas control member and the second gas control member are formed so that the heights thereof have a predetermined ratio, and wherein the first, second, and third gas control member are formed so that tilt angles thereof from the center of the wafer toward a susceptor direction are different from each other. As a result, when forming the epitaxial layer on a semiconductor wafer, gas flow can be controlled by forming the heights of devices for increasing/decreasing gas flow around the outer circumferential portion of the susceptor (gas control members) differently according to crystalline directions, thereby enabling control so that the thickness of the epitaxial wafer is uniformly formed.
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Inventors:
KANG YU-JIN (KR)
Application Number:
PCT/KR2013/009259
Publication Date:
April 24, 2014
Filing Date:
October 16, 2013
Export Citation:
Assignee:
LG SILTRON INC (KR)
International Classes:
H01L21/683; C23C16/44; H01L21/205
Foreign References:
| JP2762022B2 | 1998-06-04 | |||
| KR20090120309A | 2009-11-24 | |||
| KR20110136583A | 2011-12-21 | |||
| JP2012033775A | 2012-02-16 | |||
| KR20120092984A | 2012-08-22 |
Attorney, Agent or Firm:
SEO, Kyo Jun (KR)
서교준 (KR)
서교준 (KR)
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