Title:
SWITCH VALVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/005109
Kind Code:
A1
Abstract:
A switch valve device used for sucking members such as semiconductor chips etc., by vacuum, and vacuum breaking is quickly and smoothly performed with the valve. The valve comprises a vacuum-sucking switch valve function for vacuum sucking, a vacuum-breaking switch valve function for vacuum breaking, and an open-to-air switch valve function that, interlocked with the operation of the vacuum-sucking switch valve function, opens a passage to the air side when the vacuum-sucking switch valve function is off, and closes the passage to the air side when the vacuum-sucking switch valve function is on. The vacuum-sucking switch valve function, the vacuum-breaking switch valve function, and the open-to-air switch valve function are integrally assembled to a main body portion.
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Inventors:
TAMAKI SHIGEO (JP)
UMEDA KOSUKE (JP)
UMEDA KOSUKE (JP)
Application Number:
PCT/JP2003/008911
Publication Date:
January 20, 2005
Filing Date:
July 14, 2003
Export Citation:
Assignee:
KURODA PRECISION IND LTD (JP)
TAMAKI SHIGEO (JP)
UMEDA KOSUKE (JP)
TAMAKI SHIGEO (JP)
UMEDA KOSUKE (JP)
International Classes:
F16K51/02; (IPC1-7): B25J15/06; F16K27/00; H01L21/68
Foreign References:
| JP2002079483A | 2002-03-19 | |||
| JPH02248778A | 1990-10-04 | |||
| JP2002307356A | 2002-10-23 |
Attorney, Agent or Firm:
Furuya, Fumio (19-5 Nishishinjuku 1-Chom, Shinjuku-ku Tokyo, JP)
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