Title:
SWITCHABLE WAVELENGTH LASER-BASED ETCHED CIRCUIT BOARD PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO2001041969
Kind Code:
A3
Abstract:
A wavelength switchable laser (10) of this invention is based on a solid-state laser source (12) in which a fourth harmonic UV laser beam (26) is ordinarily used for processing, and a second harmonic "green" laser beam (28) is dumped and wasted. However, thisinvention uses the ordinarily wasted green laser beam for processing ECB (30) conductor layers (32, 36), which enhances processing throughout because of the higher power of thegreen energy than of the UV energy. A Pockel cell (16) effects laser beam polarizationswitching that causes either the green beam or the UV beam to be directed to the ECB forprocessing different materials. This invention requires only a single rail laser source and is, therefore, simple, cost effective, efficient, inherently aligned, and has high processing throughput.
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Inventors:
SUN YUNLONG (US)
SWENSON EDWARD (US)
SWENSON EDWARD (US)
Application Number:
PCT/US2000/042580
Publication Date:
February 07, 2002
Filing Date:
December 05, 2000
Export Citation:
Assignee:
ELECTRO SCIENT IND INC (US)
SUN YUNLONG (US)
SWENSON EDWARD (US)
SUN YUNLONG (US)
SWENSON EDWARD (US)
International Classes:
B23K26/06; B23K26/073; B23K26/00; B23K26/38; H01S3/00; H01S3/109; H01S3/115; H05K3/00; H05K3/40; H05K3/46; B23K101/42; (IPC1-7): H05K3/00; B23K26/00
Foreign References:
| US5500505A | 1996-03-19 | |||
| US5841099A | 1998-11-24 | |||
| GB2286787A | 1995-08-30 | |||
| DE19719700A1 | 1998-11-12 | |||
| US4839497A | 1989-06-13 | |||
| US5361268A | 1994-11-01 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 017, no. 618 (M - 1510) 15 November 1993 (1993-11-15)
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