SYMMETRICAL Z-AXIS MEMS GYROSCOPE - SHIN SUNG C&T CO LTD

Title:

SYMMETRICAL Z-AXIS MEMS GYROSCOPE

Document Type and Number:

WIPO Patent Application WO/2016/182306

Kind Code:

A1

Abstract:

A novel symmetrical Z-axis MEMS gyroscope is provided. The MEMS gyroscope comprises: a sensor frame arranged parallel to a bottom wafer substrate; a sensor mass body moving relative to the sensor frame and excited at one degree of freedom in an excitation mode; and at least one sensing electrode for sensing the displacement of the sensor mass body at one degree of freedom in a sensing mode by Coriolis force when an external angular velocity is inputted into the sensor mass body, wherein the sensor mass body comprises two mass units, the two mass units are arranged in an axisymmetric form to each other, and the antiphase movements of the two mass units are maintained by an antiphase link device directly or indirectly connected between the two mass units.

Inventors:

SONG CI MOO (KR)
YOUN KEUN JUNG (KR)
KANG JEONG SIK (KR)
KIM YONG KOOK (KR)
HAN SEUNG HO (KR)
SONG HYUN JU (KR)

Application Number:

PCT/KR2016/004861

Publication Date:

November 17, 2016

Filing Date:

May 10, 2016

Export Citation:

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Assignee:

SHIN SUNG C&T CO LTD (KR)

International Classes:

G01C19/5712; B81B7/02; G01C19/574

Foreign References:

KR20130084950A	2013-07-26
JP2013250125A	2013-12-12
KR20010045331A	2001-06-05
KR20040035946A	2004-04-30
KR20100024516A	2010-03-05

Other References: