Title:
SYSTEM FOR BATCH PROCESSING OF MAGNETIC MEDIA
Document Type and Number:
WIPO Patent Application WO/2011/085010
Kind Code:
A3
Abstract:
A method and apparatus for processing multiple substrates simultaneously is provided. Each substrate may have two major active surfaces to be processed. The apparatus has a substrate handling module and a substrate processing module. The substrate handling module has a loader assembly, a flipper assembly, and a factory interface. Substrates are disposed on a substrate carrier at the loader assembly. The flipper assembly is used to flip all the substrates on a substrate carrier in the event two-sided processing is required. The factory interface positions substrate carriers holding substrates for entry into and exit from the substrate processing module. The substrate processing module comprises a load-lock, a transfer chamber, and a plurality of processing chambers, each configured to process multiple substrates disposed on a substrate carrier.
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Inventors:
VERHAVERBEKE STEVEN (US)
MARIN JOSE ANTONIO (US)
MARIN JOSE ANTONIO (US)
Application Number:
PCT/US2011/020234
Publication Date:
September 22, 2011
Filing Date:
January 05, 2011
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
VERHAVERBEKE STEVEN (US)
MARIN JOSE ANTONIO (US)
VERHAVERBEKE STEVEN (US)
MARIN JOSE ANTONIO (US)
International Classes:
G11B5/84
Foreign References:
| JP2002517055A | 2002-06-11 | |||
| JP2008512810A | 2008-04-24 | |||
| KR20040062449A | 2004-07-07 | |||
| US20050105991A1 | 2005-05-19 |
Attorney, Agent or Firm:
PATTERSON, B. Todd et al. (L.L.P.3040 Post Oak Blvd., Suite 150, Houston Texas, US)
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